Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6523494 | Apparatus for depositing low dielectric constant oxide film | Dung-Ching Perng, Peter Wai-Man Lee | 2003-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6523494 | Apparatus for depositing low dielectric constant oxide film | Dung-Ching Perng, Peter Wai-Man Lee | 2003-02-25 |