Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649525 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio +3 more | 2003-11-18 |
| 6605546 | Dual bake for BARC fill without voids | Ramkumar Subramanian, Bhanwar Singh, Christopher F. Lyons, Marina V. Plat | 2003-08-12 |