Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649525 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Wolfram Grundke +3 more | 2003-11-18 |