Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599810 | Shallow trench isolation formation with ion implantation | Olov Karlsson, Larry Wang, Basab Bandyopadhyay, Effiong Ibok, Christopher F. Lyons | 2003-07-29 |
| 6514844 | Sidewall treatment for low dielectric constant (low K) materials by ion implantation | Jeremy I. Martin, Eric M. Apelgren, Christian Zistl, Paul R. Besser, Srikantewara Dakshina-Murthy +2 more | 2003-02-04 |