Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599810 | Shallow trench isolation formation with ion implantation | Nick Kepler, Olov Karlsson, Basab Bandyopadhyay, Effiong Ibok, Christopher F. Lyons | 2003-07-29 |
| 6530997 | Use of gaseous silicon hydrides as a reducing agent to remove re-sputtered silicon oxide | Steven C. Avanzino | 2003-03-11 |