Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632740 | Two-step process for nickel deposition | George Jonathan Kluth | 2003-10-14 |
| 6627504 | Stacked double sidewall spacer oxide over nitride | George Jonathan Kluth | 2003-09-30 |
| 6605513 | Method of forming nickel silicide using a one-step rapid thermal anneal process and backend processing | Eric N. Paton, Ercan Adem, Paul R. Besser, Matthew S. Buynoski, John Foster +4 more | 2003-08-12 |
| 6562718 | Process for forming fully silicided gates | Qi Xiang, Ercan Adem, Paul R. Besser, Matthew S. Buynoski, John Foster +5 more | 2003-05-13 |
| 6541866 | Cobalt barrier for nickel silicidation of a gate electrode | Christy Mei-Chu Woo, Minh Van Ngo, George Jonathan Kluth | 2003-04-01 |
| 6525391 | Nickel silicide process using starved silicon diffusion barrier | Minh Van Ngo | 2003-02-25 |
| 6507123 | Nickel silicide process using UDOX to prevent silicide shorting | Christy Mei-Chu Woo, Minh Van Ngo | 2003-01-14 |