Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627355 | Method of and system for improving stability of photomasks | Harry J. Levinson, Fan Piao | 2003-09-30 |
| 6562639 | Utilizing electrical performance data to predict CD variations across stepper field | Anna M. Minvielle, Luigi Capodieci | 2003-05-13 |