Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583041 | Microdevice fabrication method using regular arrays of lines and spaces | — | 2003-06-24 |
| 6562639 | Utilizing electrical performance data to predict CD variations across stepper field | Anna M. Minvielle, Christopher A. Spence | 2003-05-13 |
| 6553562 | Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques | Juan Andres Torres Robles, Lodewijk Hubertus Van Os | 2003-04-22 |