Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562639 | Utilizing electrical performance data to predict CD variations across stepper field | Luigi Capodieci, Christopher A. Spence | 2003-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562639 | Utilizing electrical performance data to predict CD variations across stepper field | Luigi Capodieci, Christopher A. Spence | 2003-05-13 |