Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599837 | Chemical mechanical polishing composition and method of polishing metal layers using same | Sudhanshu Misra, Pradip K. Roy | 2003-07-29 |
| 6585830 | Method for cleaning tungsten from deposition wall chambers | Nace Layadi, Simon John Molloy | 2003-07-01 |
| 6573183 | Method and apparatus for controlling contamination during the electroplating deposition of metals onto a semiconductor wafer surface | Minseok Oh, Deepak A. Ramappa | 2003-06-03 |
| 6541394 | Method of making a graded grown, high quality oxide layer for a semiconductor device | Yuanning Chen, Pradip K. Roy | 2003-04-01 |
| 6537135 | Curvilinear chemical mechanical planarization device and method | William Easter, John A. Maze, Frank Miceli, Charles Walter Pearce | 2003-03-25 |
| 6532489 | Electronic mail alerting system and method with user options | — | 2003-03-11 |
| 6524957 | Method of forming in-situ electroplated oxide passivating film for corrosion inhibition | Sudhanshu Misra, Pradip K. Roy | 2003-02-25 |
| 6525358 | Capacitor having the lower electrode for preventing undesired defects at the surface of the metal plug | Edward B. Harris, Yifeng Winston Yan | 2003-02-25 |