Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551946 | TWO-STEP OXIDATION PROCESS FOR OXIDIZING A SILICON SUBSTRATE WHEREIN THE FIRST STEP IS CARRIED OUT AT A TEMPERATURE BELOW THE VISCOELASTIC TEMPERATURE OF SILICON DIOXIDE AND THE SECOND STEP IS CARRIED OUT AT A TEMPERATURE ABOVE THE VISCOELASTIC TEMPERATURE | Sundar Srinivasan Chetlur, Pradip K. Roy | 2003-04-22 |
| 6541394 | Method of making a graded grown, high quality oxide layer for a semiconductor device | Sailesh Mansinh Merchant, Pradip K. Roy | 2003-04-01 |