Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6615433 | Apparatus for detecting wetness of a semiconductor wafer cleaning brush | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-09-09 |
| 6596639 | Method for chemical/mechanical planarization of a semiconductor wafer having dissimilar metal pattern densities | Sudhanshu Misra, Vivek Saxena | 2003-07-22 |
| 6579797 | Cleaning brush conditioning apparatus | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-06-17 |
| 6558238 | Apparatus and method for reclamation of used polishing slurry | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-05-06 |
| 6551410 | Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-04-22 |
| 6537135 | Curvilinear chemical mechanical planarization device and method | John A. Maze, Sailesh Mansinh Merchant, Frank Miceli, Charles Walter Pearce | 2003-03-25 |
| 6518987 | Mouse and mouse template for a motion impaired user | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-02-11 |
| 6517416 | Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-02-11 |
| 6514123 | Semiconductor polishing pad alignment device for a polishing apparatus and method of use | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-02-04 |
| 6508363 | Slurry container | Annette M. Crevasse, John A. Maze, Frank Miceli | 2003-01-21 |