Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656850 | Method for in-situ removal of side walls in MOM capacitor formation | Simon John Molloy, Edward B. Harris, Sidhartha Sen | 2003-12-02 |
| 6585830 | Method for cleaning tungsten from deposition wall chambers | Sailesh Mansinh Merchant, Simon John Molloy | 2003-07-01 |
| 6576529 | Method of forming an alignment feature in or on a multilayered semiconductor structure | David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Masis Mkrtchyan | 2003-06-10 |
| 6548906 | Method for reducing a metal seam in an interconnect structure and a device manufactured thereby | Alvaro Maury | 2003-04-15 |