Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576529 | Method of forming an alignment feature in or on a multilayered semiconductor structure | David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi | 2003-06-10 |
| 6528799 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Victor Katsap, James A. Liddle, Stuart Stanton | 2003-03-04 |