Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6651226 | Process control using three dimensional reconstruction metrology | Erik Cho Houge, Larry E. Plew | 2003-11-18 |
| 6641746 | Control of semiconductor processing | Erik Cho Houge, Edward Alios Rietman | 2003-11-04 |
| 6633032 | Mass spectrometer particle counter | Erik Cho Houge, Fred Stevie, Steven Barry Valle, Catherine Vartuli | 2003-10-14 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | Erik Cho Houge, Fred Stevie, Catherine Vartuli, Scott Jessen | 2003-09-30 |
| 6606371 | X-ray system | Michael J. Antonell, Erik Cho Houge, Larry E. Plew, Catherine Vartuli | 2003-08-12 |
| 6577970 | Method of determining a crystallographic quality of a material located on a substrate | Erik Cho Houge, Larry E. Plew, Fred Stevie, Catherine Vartuli | 2003-06-10 |
| 6569690 | Monitoring system for determining progress in a fabrication activity | Erik Cho Houge, Isik C. Kizilyalli, Fred Stevie, Catherine Vartuli | 2003-05-27 |
| 6556703 | Scanning electron microscope system and method of manufacturing an integrated circuit | Brittin Kane | 2003-04-29 |