Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6651226 | Process control using three dimensional reconstruction metrology | John M. McIntosh, Larry E. Plew | 2003-11-18 |
| 6641746 | Control of semiconductor processing | John M. McIntosh, Edward Alios Rietman | 2003-11-04 |
| 6633032 | Mass spectrometer particle counter | John M. McIntosh, Fred Stevie, Steven Barry Valle, Catherine Vartuli | 2003-10-14 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | John M. McIntosh, Fred Stevie, Catherine Vartuli, Scott Jessen | 2003-09-30 |
| 6625250 | Optical structures and methods for x-ray applications | — | 2003-09-23 |
| 6606371 | X-ray system | Michael J. Antonell, John M. McIntosh, Larry E. Plew, Catherine Vartuli | 2003-08-12 |
| 6577970 | Method of determining a crystallographic quality of a material located on a substrate | John M. McIntosh, Larry E. Plew, Fred Stevie, Catherine Vartuli | 2003-06-10 |
| 6569690 | Monitoring system for determining progress in a fabrication activity | Isik C. Kizilyalli, John M. McIntosh, Fred Stevie, Catherine Vartuli | 2003-05-27 |
| 6534851 | Modular semiconductor substrates | Michael J. Antonell, Nitin M. Patel, Larry E. Plew, Catherine Vartuli | 2003-03-18 |