Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479311 | Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning | Bruce R. Scharf, Joel A. Kubby, Jingkuang Chen, Chuang-Chia Lin, Alex T. Tran | 2002-11-12 |
| 6479315 | Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Jingkuang Chen, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran | 2002-11-12 |
| 6467879 | Method and apparatus for preventing degradation of electrostatically actuated devices | Joel A. Kubby, Elliott A. Eklund | 2002-10-22 |
| 6465856 | Micro-fabricated shielded conductors | Jingkuang Chen | 2002-10-15 |
| 6413793 | Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers | Chuang-Chia Lin, Alex T. Tran, Nena Liakopoulos | 2002-07-02 |