Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479311 | Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning | Bruce R. Scharf, Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Chuang-Chia Lin | 2002-11-12 |
| 6479315 | Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Peter M. Gulvin, Jingkuang Chen, Joel A. Kubby, Chuang-Chia Lin | 2002-11-12 |
| 6413793 | Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers | Chuang-Chia Lin, Peter M. Gulvin, Nena Liakopoulos | 2002-07-02 |
| 6379989 | Process for manufacture of microoptomechanical structures | Joel A. Kubby, Jingkuang Chen | 2002-04-30 |
| 6362512 | Microelectromechanical structures defined from silicon on insulator wafers | Joel A. Kubby, Jingkuang Chen | 2002-03-26 |