Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479311 | Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning | Bruce R. Scharf, Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Alex T. Tran | 2002-11-12 |
| 6479315 | Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Peter M. Gulvin, Jingkuang Chen, Joel A. Kubby, Alex T. Tran | 2002-11-12 |
| 6413793 | Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers | Peter M. Gulvin, Alex T. Tran, Nena Liakopoulos | 2002-07-02 |