Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479315 | Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step | Peter M. Gulvin, Jingkuang Chen, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran | 2002-11-12 |