Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498532 | System and method for linearizing vacuum electronic amplification | Yehuda Goren, Charles E. Jensen, Donald R. Gagne, Philip M. Lally | 2002-12-24 |
| 6426298 | Method of patterning a dual damascene | Chan-Lon Yang | 2002-07-30 |
| 6379574 | Integrated post-etch treatment for a dielectric etch process | Hui Ou-Yang, Chih-Ping Yang, Lin-Xiu Ye, Robert Wu, Chih-Pang Chen +2 more | 2002-04-30 |
| 6361929 | Method of removing a photo-resist layer on a semiconductor wafer | Hsein-Ta Chung, Yi-Yu Hsu, Tri-Rung Yew | 2002-03-26 |
| 6352938 | Method of removing photoresist and reducing native oxide in dual damascene copper process | Hsi-Ta Chuang, Chan-Lon Yang | 2002-03-05 |