Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379574 | Integrated post-etch treatment for a dielectric etch process | Chih-Ping Yang, Lin-Xiu Ye, Robert Wu, Chih-Pang Chen, You-Neng Cheng +2 more | 2002-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379574 | Integrated post-etch treatment for a dielectric etch process | Chih-Ping Yang, Lin-Xiu Ye, Robert Wu, Chih-Pang Chen, You-Neng Cheng +2 more | 2002-04-30 |