Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457725 | Septic tank gasket | — | 2002-10-01 |
| 6431112 | Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck | Edward L. Sill, Craig T. Baldwin | 2002-08-13 |
| 6395095 | Process apparatus and method for improved plasma processing of a substrate | Robert Rowan, Edward L. Sill, Thomas J. Licata | 2002-05-28 |
| 6367413 | Apparatus for monitoring substrate biasing during plasma processing of a substrate | Edward L. Sill, Craig T. Baldwin | 2002-04-09 |