Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431112 | Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck | Edward L. Sill, William Jones | 2002-08-13 |
| 6367413 | Apparatus for monitoring substrate biasing during plasma processing of a substrate | Edward L. Sill, William Jones | 2002-04-09 |