Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431112 | Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck | William Jones, Craig T. Baldwin | 2002-08-13 |
| 6395095 | Process apparatus and method for improved plasma processing of a substrate | William Jones, Robert Rowan, Thomas J. Licata | 2002-05-28 |
| 6367413 | Apparatus for monitoring substrate biasing during plasma processing of a substrate | William Jones, Craig T. Baldwin | 2002-04-09 |