Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465347 | Tungsten film forming method | Hotaka Ishizuka | 2002-10-15 |
| 6399484 | Semiconductor device fabricating method and system for carrying out the same | Hideaki Yamasaki, Satoshi Yonezawa, Susumu Arima, Yumiko Kawano, Keizo Hosoda | 2002-06-04 |
| 6346425 | Vapor-phase processing method capable of eliminating particle formation | Natsuko Ito, Tsuyoshi Moriya, Fumihiko Uesugi, Shuji Moriya, Masaru Aomori +1 more | 2002-02-12 |