Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423176 | Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles | Fumihiko Uesugi, Tsuyoshi Moriya | 2002-07-23 |
| 6346425 | Vapor-phase processing method capable of eliminating particle formation | Tsuyoshi Moriya, Fumihiko Uesugi, Shuji Moriya, Masaru Aomori, Yoshinori Kato +1 more | 2002-02-12 |