Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489198 | Semiconductor device and method of manufacturing the same | Yumiko Kawano | 2002-12-03 |
| 6486063 | Semiconductor device manufacturing method for a copper connection | Yumiko Kawano | 2002-11-26 |
| 6436203 | CVD apparatus and CVD method | Takeshi Kaizuka, Takashi Horiuchi, Masami Mizukami, Takashi Mochizuki, Yumiko Kawano | 2002-08-20 |
| 6399484 | Semiconductor device fabricating method and system for carrying out the same | Satoshi Yonezawa, Susumu Arima, Yumiko Kawano, Mitsuhiro Tachibana, Keizo Hosoda | 2002-06-04 |