Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399484 | Semiconductor device fabricating method and system for carrying out the same | Hideaki Yamasaki, Satoshi Yonezawa, Susumu Arima, Yumiko Kawano, Mitsuhiro Tachibana | 2002-06-04 |
| 6355582 | Silicon nitride film formation method | Nobuaki Shigematsu, Yusuke Muraki, Atsushi Sato | 2002-03-12 |