NS

Nobuaki Shigematsu

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
📍 Yamanashi, JP: #68 of 208 inventorsTop 35%
Overall (2002): #145,029 of 266,432Top 55%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6355582 Silicon nitride film formation method Keizo Hosoda, Yusuke Muraki, Atsushi Sato 2002-03-12