Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488863 | Plasma etching method | Koichi Yatsuda, Tetsuya Nishiara, Shin Okamoto | 2002-12-03 |
| 6465359 | Etchant for use in a semiconductor processing method and system | Masahiro Yamada, Youbun Ito, Abron Toure, Kunihiko Hinata, Hiromi Sakima | 2002-10-15 |