KY

Koichi Yatsuda

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #171,286 of 266,432Top 65%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6488863 Plasma etching method Tetsuya Nishiara, Kouichiro Inazawa, Shin Okamoto 2002-12-03