SO

Shin Okamoto

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
📍 Yamanashi, WA: #2 of 2 inventorsTop 100%
Overall (2002): #117,453 of 266,432Top 45%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6488863 Plasma etching method Koichi Yatsuda, Tetsuya Nishiara, Kouichiro Inazawa 2002-12-03