Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465359 | Etchant for use in a semiconductor processing method and system | Masahiro Yamada, Youbun Ito, Kouichiro Inazawa, Abron Toure, Kunihiko Hinata | 2002-10-15 |
| 6455411 | Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics | Ping Jiang, Francis G. Celii, Kenneth Newton | 2002-09-24 |