Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455411 | Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics | Ping Jiang, Francis G. Celii, Hiromi Sakima | 2002-09-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455411 | Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics | Ping Jiang, Francis G. Celii, Hiromi Sakima | 2002-09-24 |