Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500761 | Method for improving the adhesion and durability of CVD tantalum and tantalum nitride modulated films by plasma treatment | Cory Wajda | 2002-12-31 |
| 6482477 | Method for pretreating dielectric layers to enhance the adhesion of CVD metal layers thereto | Richard Westhoff, Steven P. Caliendo | 2002-11-19 |
| 6471782 | Precursor deposition using ultrasonic nebulizer | Ching-Ping Fang | 2002-10-29 |
| 6455414 | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers | Cory Wajda, Steven P. Caliendo | 2002-09-24 |
| 6409837 | Processing system and method for chemical vapor deposition of a metal layer using a liquid precursor | — | 2002-06-25 |
| 6368987 | Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions | Stanislaw Kopacz, Douglas A. Webb, Gerrit J. Leusink, Rene E. LeBlanc, Michael S. Ameen +2 more | 2002-04-09 |