Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500761 | Method for improving the adhesion and durability of CVD tantalum and tantalum nitride modulated films by plasma treatment | Joseph T. Hillman | 2002-12-31 |
| 6455414 | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers | Joseph T. Hillman, Steven P. Caliendo | 2002-09-24 |