Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482477 | Method for pretreating dielectric layers to enhance the adhesion of CVD metal layers thereto | Richard Westhoff, Joseph T. Hillman | 2002-11-19 |
| 6455414 | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers | Joseph T. Hillman, Cory Wajda | 2002-09-24 |