Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417626 | Immersed inductively—coupled plasma source | Jozef Brcka, John Drewery, Michael Grapperhaus, Glyn Reynolds, Mirko Vukovic +1 more | 2002-07-09 |
| 6368987 | Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions | Stanislaw Kopacz, Douglas A. Webb, Rene E. LeBlanc, Michael S. Ameen, Joseph T. Hillman +2 more | 2002-04-09 |