Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494998 | Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma using an internal inductive element | — | 2002-12-17 |
| 6474258 | Apparatus and method for improving plasma distribution and performance in an inductively coupled plasma | — | 2002-11-05 |
| 6446572 | Embedded plasma source for plasma density improvement | — | 2002-09-10 |
| 6417626 | Immersed inductively—coupled plasma source | John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds, Mirko Vukovic +1 more | 2002-07-09 |