Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426477 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Jun Ooyabu, Hideki Takeuchi | 2002-07-30 |
| 6423242 | Etching method | Masayuki Kojima, Yoshifumi Tahara, Masayuki Tomoyasu | 2002-07-23 |