Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2002-12-10 |
| 6436753 | Semiconductor integrated circuit and method for manufacturing the same | Shuji Ikeda, Yasuko Yoshida, Kenji Shiozawa, Mitsuyuki Kimura, Norio Nakagawa +4 more | 2002-08-20 |
| 6423242 | Etching method | Yoshifumi Tahara, Masayuki Tomoyasu, Akira Koshiishi | 2002-07-23 |
| 6403446 | Method for manufacturing semiconductor device | Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Yasuko Yoshida, Norio Suzuki +1 more | 2002-06-11 |