MT

Masayuki Tomoyasu

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #157,003 of 266,432Top 60%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6423242 Etching method Masayuki Kojima, Yoshifumi Tahara, Akira Koshiishi 2002-07-23