Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426477 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi | 2002-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426477 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi | 2002-07-30 |