Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492222 | Method of dry etching PZT capacitor stack to form high-density ferroelectric memory devices | — | 2002-12-10 |
| 6485988 | Hydrogen-free contact etch for ferroelectric capacitor formation | Shawming Ma, Rahim Kavari, Scott R. Summerfelt, Tomoyuki Sakoda | 2002-11-26 |
| 6444542 | Integrated circuit and method | Theodore S. Moise, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert, Francis G. Celii +2 more | 2002-09-03 |
| 6424040 | Integration of fluorinated dielectrics in multi-level metallizations | Somnath Nag, Changming Jin, Wei-Yung Hsu | 2002-07-23 |
| 6410426 | Damascene cap layer process for integrated circuit interconnects | Ping Jiang | 2002-06-25 |