Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485988 | Hydrogen-free contact etch for ferroelectric capacitor formation | Shawming Ma, Guoqiang Xing, Scott R. Summerfelt, Tomoyuki Sakoda | 2002-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485988 | Hydrogen-free contact etch for ferroelectric capacitor formation | Shawming Ma, Guoqiang Xing, Scott R. Summerfelt, Tomoyuki Sakoda | 2002-11-26 |