Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497993 | In situ dry etching procedure to form a borderless contact hole | Hun-Jan Tao, Chia-Shiung Tsai, Chu-Yun Fu | 2002-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497993 | In situ dry etching procedure to form a borderless contact hole | Hun-Jan Tao, Chia-Shiung Tsai, Chu-Yun Fu | 2002-12-24 |