Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495297 | Type mask for combining off axis illumination and attenuating phase shifting mask patterns | Chih-Chiang Tu | 2002-12-17 |
| 6432588 | Method of forming an improved attenuated phase-shifting photomask | Ching-Shiun Chiu | 2002-08-13 |
| 6423455 | Method for fabricating a multiple masking layer photomask | — | 2002-07-23 |
| 6403267 | Method for high transmittance attenuated phase-shifting mask fabrication | Wei-Zen Chen | 2002-06-11 |