Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495297 | Type mask for combining off axis illumination and attenuating phase shifting mask patterns | San-De Tzu | 2002-12-17 |
CT
Chih-Chiang Tu
Overall (2002): #239,894 of 266,432Top 95%
1
Patents 2002