Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432588 | Method of forming an improved attenuated phase-shifting photomask | San-De Tzu | 2002-08-13 |
| 6361904 | Method for repairing the shifter layer of an alternating phase shift mask | — | 2002-03-26 |